Contents

• Objectives
• Status of Effort and Major Accomplishments
• MURI Supported Publications - August 1997 - July 1998
  • Books (Stanford)
  • Book Chapters (Stanford)
  • Book Chapters (BU/Princeton/Yale)
  • Published/Accepted Journal Papers (Stanford)
  • Published/Accepted Journal Papers (BU/Princeton/Yale)
  • Submitted Journal Papers (Stanford)
  • Submitted Journal Papers (BU/Yale/Princeton)
  • Published/Accepted Conference Papers (Stanford)
  • Published/Accepted Conference Papers (BU/Princeton/Yale)
  • Submitted Conference Papers (Stanford)
• Interactions/Transitions
  • Interactions (Stanford)
  • Transitions (Stanford)
    • Integrated Bake/Chill Module
    • Piezoelectric Drop-on-Demand Fluid Ejector
  • Transitions (BU/Yale/Princeton)
    • Illuminator Optimization Software
    • Fast Aerial Image Software
• New Discoveries, Inventions or Patent Disclosures
  • Patents Awarded (Stanford)
  • Submitted Patents (Stanford)
  • Invention Disclosures (Stanford)
• Honors/Awards
  • Honors/Awards in 97/98
  • Major Honors - Prof. T. Kailath
• Detailed Overview of Projects
  • Photoresist Process Monitoring Sensors
    • Introduction
    • Technical Description of the Sensor
    • Photoresist Pre-Exposure Bake Monitoring Update
    • Postbake Measurement Results
    • Development Monitoring
    • Future Work
    • Conclusions
  • Overlay and Alignment
    • Goal
    • Background
    • High accuracy positioning based on subspace decomposition of alignment signals
    • Design and implementation of experiments for verification of the subspace-based alignment technique
    • Application of subspace-based technique to global alignment
    • Industrial Interaction
  • Thermal Cycling Module for Photoresist Processing
    • Introduction
    • Experimental Results
  • Approximations for Partially Coherent Optical Imaging
    • Introduction
    • About the Hopkins model
    • Two existing approximation methods
  • Average Coherence Approximation (ACA)
    • Optimal Coherent Decomposition (OCD)
    • A new approach to the decomposition problem
    • Solution approaches
    • Comments on the choice of an error measure
    • Simulation results
    • Comparisons and conclusions
  • Control Issues
    • Iterative Feedback Tuning
    • Robust Model Predictive Control
    • Bake and Chill of Silicon Wafers
    • Photoresist Cure Monitoring
    • Control of Drop-Ejector
    • Blind Channel Deconvolution
  • CVD Process Simulation
  • Single Mixed-Potential Integral Equation for Mask Diffraction Simulation
  • Net-Faim: Distributed Computation of Aerial Images
  • Illuminator Optimization
    • Imaging
    • Contrast
    • Optimization
  • Photoresist Deposition without Spinning by Using Inkjet Technology and Micromachined Two Dimensional Array Fluid Ejectors
    • Large Scale Device
    • Micromachining