Information Systems Laboratory
Edward L. Ginzton Laboratory
Solid State Laboratory

PROJECTS

• Phase shift mask design
• Photoresist ejection without spinning
• Alignment by using subspace technique
• Photoresist cure and develop monitoring
• Programmable spatial thermal control
• Nanopositioning control
• Patterning via permeable membranes
• Integrated bake develop technology
• Control algorithms

FACULTY

• Prof. T. Kailath (Principal Investigator) (Stanford University)
• Prof. B. T. (Pierre) Khuri-Yakub (Stanford University)
• Prof. F. Pease (Stanford University)
• Prof. Eytan Barouch (Boston University)
• Prof. Micheal Yeung (Boston University)
• Prof. Dan Cole (Boston University)
• Prof. Steven Orszag (Yale University)

RESEARCH ASSOCIATES

• Dr. Levent F. Degertekin
  
• Dr. Chuck Schaper

GRADUATE STUDENTS

• Mr. Khalid Abbas El-Awady
  
• Ms. Lay Lay Lee
  
• Mr. Gökhan Perçin
  
• Mr. Young Peng Poh
  
• Mr. Arthur Tey
  
• Mr. Kenneth Tsai

VISITING RESEARCHERS

• Dr. Weng Khuen Ho

FORMER GRADUATE STUDENTS

• Dr. Paul Dankoski
  
• Dr. Babak Khalaj
  
• Dr. Poo Gyeon Park
  
• Dr. Yaoting Wang
  
• Dr. Bijit Halder
  
• Dr. Babak Hassibi
  
• Dr. Amir Aalam Ghazanfarian
  
• Dr. Susan L. Morton

ANNOUNCEMENTS

Last updated August 24, 1999.
Any suggestions? Please mail to Gökhan Perçin